Single edge coupling of chips with integrated waveguides

ABSTRACT

Techniques are provided for single edge coupling of chips with integrated waveguides. For example, a package structure includes a first chip with a first critical edge, and a second chip with a second critical edge. The first and second chips include integrated waveguides with end portions that terminate on the first and second critical edges. The second chip includes a signal reflection structure that is configured to reflect an optical signal propagating in one or more of the integrated waveguides of the second chip. The first and second chips are edge-coupled at the first and second critical edges such that the end portions of the integrated waveguides of the first and second chips are aligned to each other, and wherein all signal input/output between the first and second chips occurs at the single edge-coupled interface.

TECHNICAL FIELD

This disclosure generally relates to packaging and assembly ofmicroelectronic, photonic and optoelectronic devices with integratedwaveguides.

BACKGROUND

In photonics applications, photonic chips, optoelectronic (OE) chips,and other types of chips are typically packaged together to implementvarious functions with regard to light including, for example,generating, emitting, transmitting, modulating, signal processing,amplifying, and/or detecting/sensing light within the visible andnear-infrared portions of the electromagnetic spectrum. Varioustechniques are used for aligning and edge coupling two or more chips,which have integrated waveguide structures, to allow passing of wavesignals between the edge-coupled chips which process the wave signals.Mechanical alignment of the chips must be very precise inthree-dimensions so that there is sufficient alignment between theinput/output portions of the integrated waveguides between theedge-coupled chips. Indeed, in cases where photonic chips and and/or OEchips containing integrated waveguide structures are edge-coupled toeach other in a package structure, if there is misalignment between theend portions of the integrated waveguides at the edge-coupled interfacebetween the different chips, there can be significant reflection andloss of optical signals at the edge-coupled interfaces. The reflectionof optical signals is known to cause undesirable effects such as, by wayof example only, increased laser relative intensity noise (RIN),cavity-induced wavelength dependencies, and optical amplifier gainripple. In this regard, chip-to-chip edge coupling is one of thepersistent challenges in photonics systems due to limitations andtolerances in, e.g., the semiconductor fabrication techniques used tofabricate the chips, and the tools utilized for assembling chip packagestructures.

SUMMARY

Embodiments of the invention include devices and methods for single edgecoupling of chips with integrated waveguides. For example, in oneembodiment, a package structure comprises a first chip and a secondchip. The first chip comprises a first critical edge, a first integratedwaveguide, and a second integrated waveguide, wherein the first andsecond integrated waveguides of the first chip each comprise an endportion that terminates on the first critical edge of the first chip.The second chip comprises a second critical edge, a first integratedwaveguide, a second integrated waveguide, and a signal reflectionstructure, wherein the first and second integrated waveguides of thesecond chip each comprise an end portion that terminates on the secondcritical edge of the second chip, and an end portion that is coupled tothe signal reflection structure. The signal reflection structure isconfigured to reflect an optical signal propagating in at least one ofthe first and second integrated waveguides of the second chip. The firstand second chips are edge-coupled at the first and second critical edgessuch that the end portions of the first integrated waveguides of thefirst and second chips are aligned to each other, and the end portionsof the second integrated waveguides of the first and second chips arealigned to each other.

These and other embodiments of the invention will be described or becomeapparent from the following detailed description of embodiments, whichis to be read in conjunction with the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 schematically illustrates a package structure which implementsmulti-edge coupling of chips with integrated waveguides.

FIG. 2 schematically illustrates a package structure which implementssingle edge coupling of chips with integrated waveguides, according toan embodiment of the invention.

FIG. 3 schematically illustrates a package structure which implementssingle edge coupling of chips with integrated waveguides, according toanother embodiment of the invention.

FIG. 4 schematically illustrates a package structure which implementssingle edge coupling of chips with integrated waveguides, according toanother embodiment of the invention.

FIG. 5 schematically illustrates a package structure which implementssingle edge coupling of chips with integrated waveguides, according toanother embodiment of the invention.

FIG. 6 schematically illustrates a package structure which implementssingle edge coupling of chips with integrated waveguides, according toanother embodiment of the invention.

FIG. 7 schematically illustrates a package structure which implementssingle edge coupling of chips with integrated waveguides, according toanother embodiment of the invention.

FIG. 8 schematically illustrates a package structure which implementssingle edge coupling of chips with integrated waveguides, according toanother embodiment.

DETAILED DESCRIPTION

Embodiments of the invention will now be discussed in further detailwith regard to the assembly of microelectronic, photonic andoptoelectronic devices using single edge coupling techniques whichfacilitate three-dimensional alignment and coupling of photonics and OEchips with integrated waveguides. While embodiments of the invention canbe utilized in various applications in which wave signals aretransmitted between edge-coupled chips, for purposes of illustration,exemplary embodiments of the invention will be discussed in the contextof optical applications in which three-dimensional alignment is achievedto align integrated waveguide structures of photonics and optoelectronicchips using single edge coupling techniques. As explained in furtherdetail below, rather than transmitting an optical signal from one edgeof an OE chip to another (different) edge of the OE chip, embodiments ofthe invention implement techniques to enable the coupling of opticalsignals to/from a single edge of the OE chip, wherein all signal I/O(input/output) between two edge-coupled chips occurs at a singleedge-coupled interface between the chips. The single edge couplingtechniques as discussed herein achieve higher performance and lowercosts for manufacturing and assembly, as compared to conventionalmulti-edge coupling techniques.

For example, FIG. 1 schematically illustrates a package structure 100which implements multi-edge coupling of chips with integratedwaveguides. The package structure 100 comprises a first chip 110 and asecond chip 120. The first chip 110 comprises a first integratedwaveguide 112, a second integrated waveguide 114, and a recessed cavity116 formed in a surface of the first chip 110. The second chip 120comprises an integrated waveguide 122 which extends from one edge to anopposite edge the second chip 120, and which passes through an activearea 125 that comprises signal processing circuitry. The second chip 120is mounted in the cavity 116 of the first chip 110 using known mountingand alignment techniques to align the first and second integratedwaveguides 112 and 114 of the first chip 110 to the respective ends ofthe integrated waveguide 122 of the second chip 120. With the packagestructure 100 of FIG. 1, the mounting and alignment process is performedto enable edge coupling of the first and second chips 110 and 120 sothat a wave signal (e.g., optical signal) propagating in the firstintegrated waveguide 112 of the first chip 110 can be sufficientlycoupled to an input end of the integrated waveguide 122 of the secondchip 120, and propagate along the integrated waveguide 122 forprocessing in the active region 125, and then output to the first chip110 by coupling the processed signal from an output end of theintegrated waveguide 122 to an input of the second integrated waveguide114 of the first chip 110 (in FIG. 1, the direction of wave propagationis illustrated by arrows in the integrated waveguides 112, 122, and114).

For photonic applications, the first chip 110 may be a photonic chipcomprising a silicon (Si) substrate, a lithium niobate (Limb) substrate,a compound III-V semiconductor substrate (e.g., gallium arsenide (GaAs),indium phosphide (InP), etc.), or other suitable substrates, havingcircuitry to convert electrical signals to optical signals (e.g., laserdiodes) and integrated waveguides to guide the optical signals to/fromtarget locations. The first chip 110 may also comprise an interfacestructure to couple optical fibers to the first chip 110 (via adiabaticcoupling or other known coupling techniques) to enable coupling ofoptical signals between the optical fibers and the integrated waveguidesof the first chip 110. The integrated waveguides 112, 114, and 122 ofthe chips 110 and 120 comprise waveguide cores with rectangular-shapedcross-sections, and cladding layers that surround or otherwiseencapsulate the waveguide cores. The types of semiconductor materialsthat are used to form the waveguide cores and the types of materialsused to form the cladding layers will vary depending on the application.

For example, the integrated waveguides can be fabricated to havesemiconductor cores (e.g., Si or silicon nitride) and insulating (e.g.,silicon oxide) cladding layers. In this instance, the integratedwaveguide cores can be patterned from a semiconductor layer of asemiconductor-on-insulator substrate, and the cladding layers can beformed by depositing and patterning a cladding material to form thecladding layers on the sides and upper surfaces of the patternedwaveguide cores. In other embodiments, the cladding on the sides andupper surfaces of the semiconductor cores may be air. In otherembodiments, the waveguide cores can be formed by doping surface regionsof a semiconductor substrate (e.g., doping surface regions of a LiNbsubstrate), wherein the doped regions form the integrated waveguidestructures. Although the size of the waveguide core and cladding layerwill vary depending on the material used and the operating wavelengths,a silicon waveguide core can have a width that is about 0.3 microns anda height of about 0.15 microns, while the cladding layer can have athickness of several microns. The basic design of an integratedwaveguide (e.g., single-mode waveguide) is to have a waveguide core thatis formed of a material with a high refractive index and a surroundingcladding layer that is formed with a material having a lower refractiveindex.

In addition, the second chip 120 may comprise a special purposeoptoelectronic (OE) chip having optical signal processing circuitry(formed within the active region 125) such as semiconductor opticalamplifier (SOA) circuitry, EO modulator circuitry, wavelength-divisionmultiplexing (WDM) circuitry, etc., for processing optical signals thatare coupled from the first chip 110. As is known in the art, a SOA isdevice that can amplify an optical signal directly, without having toconvert the optical signal to an electrical signal. A WDM circuit isconfigured to multiplex a plurality of optical carrier signals into asingle optical fiber (or optical waveguide transmission medium) usingdifferent wavelengths of laser light. Further, an EO modulator is adevice that is configured to modulate the power, phase, or polarizationof an optical signal (e.g., laser beam) with an electrical controlsignal. For example, an EO phase modulator is a device which isconfigured to change a phase delay of an optical signal that propagatesthrough the EO phase modulator device by the application of a controlvoltage.

The package structure 100 of FIG. 1 illustrates an example in which thefirst chip 110 serves as mechanical substrate to support the second chip120 (e.g., OE chip) which is mounted within the cavity 116 of the firstchip 110. In other embodiments, multiple chips can be edge-coupledtogether to form a chain of OE processing components in which apropagating optical signal is sequentially transmitted from one chip tothe next (via edge coupling of integrated waveguides) and processed(e.g., modulated, amplified, etc.) to implement a given photonicsapplication.

In the package structure 100 shown in FIG. 1, an assembly process isutilized to ensure a proper three-dimensional alignment between thefirst and second chips 110 and 120 so that the coupling ends of theintegrated waveguides are sufficiently aligned to each other in the X, Yand Z directions, as indicted by XYZ Cartesian coordinates shown inFIG. 1. It is to be understood that the term “vertical” as used hereindenotes a Z-direction of the Cartesian coordinates shown in thedrawings, and that the terms “horizontal” or “lateral” as used hereindenotes an X-direction and/or Y-direction of the Cartesian coordinatesshown in the drawings, which is perpendicular to the Z-direction. Inparticular, the Z-direction alignment (which is perpendicular to theplane (surface) of the chips 110 and 120) ensures that the second chip120 is mounted in the cavity 116 such that ends of the integratedwaveguide 122 of the second chip are disposed at the same verticalheight as the ends of the integrated waveguides 112 and 114 exposed onthe sidewall edges of the etched cavity 116. In addition, theY-direction alignment ensures that the second chip 120 is mounted in thecavity 116 such that ends of the integrated waveguide 122 at theopposing edges of the second chip 120 are laterally aligned to the endsof the integrated waveguides 112 and 114 exposed on the sidewall edgesof the etched cavity 116. In this regard, a proper Y and Z alignment isachieved when the cross-sectional areas of adjacent end portions of theintegrated waveguides on the different chip either completely orsubstantially overlap to ensure sufficient optical signal couplingbetween the adjacent ends of the integrated waveguides.

Further, the X-direction alignment ensures that the second chip 120 ismounted in the cavity 116 such that a gap size G1 and G2 of the gapsbetween the critical edges of the chips 110 and 120 (e.g., the sidewallsof the cavity 116 and the edges of the second chip 120 adjacent to thecavity sidewalls) are sufficiently small. In this regard, alignment inthe X direction is crucial to ensure that the gap sizes G1 and G2 areless than a maximum gap size (e.g., less than 1 micron) for the givenapplication, so that the optical signals can be readily transmittedacross the gaps G1 and G2 and achieve sufficient edge coupling. As isknown in the art, the loss in optical signal energy at the gaps G1 andG2 is a function of the width of the gaps G1 and G2, and the Y and/or Zmisalignment between the end portions of the integrated waveguides onthe first and second chips 110 and 120. Indeed, gaps and misalignmentson the order of one micrometer or more can induce significant opticalsignal losses on the order of 2× to 10× (or 3 dB to 10 dB), whichdegrades overall performance.

To minimize the size of the gaps G1 and G2, costly manufacturingtechniques must be utilized to form (via etching) the cavity region 116in the first chip 110 and to form the second chip 120 with tightdimensional tolerances that ensure proper alignment of the chips 110 and120. In other words, the first and second chips 110 and 120 must befabricated with matching sizes within a given tolerance, so that thesecond chip 120 can be properly mounted within the cavity 116 of thefirst chip 110 with proper gap sizes G1 and G2, which can be problematicon various levels. For example, the second chip 120 is formed on asemiconductor wafer with a plurality of other chips, separated from thewafer using standard wafer dicing methods. However, when dicing a waferinto a plurality of similar chips using standard manufacturing equipmentand techniques, there can be variations in the size of the diced chips(dies) in a range of +/−15 microns.

In this regard, with the package structure 100 of FIG. 1, the secondchip 120 must be fabricated using high-precision dicing and polishingtechniques to ensure that the second chip 120 is properly dimensioned tonot only fit within the cavity 116, but to snuggly fit within the cavity116 such that the gap sizes G1 and G1 are sufficiently small to ensureproper wave signal coupling. Moreover, when using high speed pick andplace tools for chip package assembly, there can be variations in theinitial chip (die) placement in a range of +/−10 microns. The variationsin device fabrication, chip size, and chip assembly, etc., make itdifficult to achieve proper gapping and waveguide alignment for thechips 110 and 120 of the package structure 100 in FIG. 1. In thisregard, constructing the package structure 100 can be complicated andcostly due to the expensive high-precision equipment and time-consumingfabrication techniques that are needed to achieve proper XYZ alignment.

To realize higher performance and lower costs for manufacturing andassembly of package structures for, e.g., photonics applications,embodiments of the invention provide package structures and methods forcoupling microelectronic, photonic and optoelectronic devices usingsingle edge coupling of chips with integrated waveguide structures tofacilitate wave-coupling and alignment between the integrated waveguidestructures of edge-coupled chips. Various package structures usingsingle edge coupling of chips will now be explained in further detailwith reference to FIGS. 2-8. In the exemplary package structuresdiscussed below, all signal I/O between two edge-coupled chips occur ata single edge-coupled interface between the chips. The single edgecoupling techniques achieve higher performance and lower costs formanufacturing and assembly, as compared to a conventional multi-edgecoupling technique, such as shown in FIG. 1.

In particular, FIG. 2 schematically illustrates a package structure 200which implements single edge coupling of chips with integratedwaveguides, according to an embodiment of the invention. The packagestructure 200 comprises a first chip 210 and a second chip 220. Thefirst chip 210 comprises a first integrated waveguide 212 and a secondintegrated waveguide 214. The second chip 220 comprises a U-shapedintegrated waveguide 221 comprising a first (input) waveguide portion222, a second (output) waveguide portion 224, and a third waveguideportion 223. The first and second integrated waveguides 212 and 214 ofthe first chip 210 have end portions disposed at a critical edge E1 ofthe first chip 210, and the input and output waveguide portions 222 and224 of the U-shaped integrated waveguide 221 have end portions disposedat a critical edge E2 of the second chip 210. The third waveguideportion 223 is disposed within an active region 225 of the second chip220. It is to be understood that the various components (e.g., the firstand second chips 210 and 220, the integrated waveguides 212, 214 and221, and the active region 225) of the package structure 200 can beformed of the same or similar materials, structures, and optical signalprocessing circuitry as in other embodiments discussed above.

With the package structure 200 of FIG. 2, a 3-D alignment process (XYZalignment) is performed to enable single edge coupling of the criticaledges E1 and E2 of the first and second chips 210 and 220 so that a wavesignal (e.g., optical signal) propagating in the first integratedwaveguide 212 of the first chip 210 can be sufficiently coupled to aninput end of the integrated waveguide portion 222 of the second chip220, and propagate along the U-shaped integrated waveguide 221 forprocessing in the active region 225, and then output to the first chip210 by coupling the processed signal from an output end of theintegrated waveguide 224 to an input of the second integrated waveguide214 of the first chip 210 (in FIG. 2, the direction of wave propagationis illustrated by arrows in the integrated waveguides 212, 214, and221). The 3-D alignment process can be implemented using varioustechniques.

In one embodiment, XYZ alignment can be performed using the alignmenttechniques disclosed in U.S. Pat. No. 9,606,308, entitled “ThreeDimensional Self-Alignment of Flip Chip Assembly Using Solder SurfaceTension During Solder Reflow,” which is commonly assigned and fullyincorporated herein by reference. U.S. Pat. No. 9,606,308 disclosestechniques for assembly and packaging of microelectronic, photonics andoptoelectronic devices in which three-dimensional alignment of packagecomponents is achieved using solder surface tension during a solderreflow process to move one or more package components and align suchcomponents in X, Y and Z directions using mechanical stops and chipbutting (edge coupling) techniques. The techniques disclosed in U.S.Pat. No. 9,606,308 can be implemented to align the first and secondchips 210 and 220 in a manner in which the critical edges E1 and E2 aredisposed in contact with each other, such that there is no gap (i.e.,gap size G=0) between the critical edges E1 and E2 (i.e., there is nogap between the aligned ends of the integrated waveguides 212 and 222,and no gap between the aligned ends of the integrated waveguides 214 and224).

In another embodiment, the single edge coupling of the critical edges E1and E2 of the first and second chips 210 and 220 can be performed usingan epoxy and a robotic XYZ alignment system. With this process, an epoxyglue can be disposed on one or both of the critical edges E1 and E2 ofthe first and second chips 210 and 220, and a robotic system can placethe first and second chips 210 and 220 in position with the criticaledges E1 and E2 placed in contact to each other at some predeterminedgap distance G which ensures that some thickness of epoxy glue remainsbetween the critical edges E1 and E2 to enable bonding. A 3D (XYZ)alignment process can be performed by transmitting light signals throughthe integrated waveguides of the first and second chips 210 and 220 andmonitoring the intensity of the light that is transmitted from the firstintegrated waveguide 212, through the U-shaped integrated waveguide 221,and out to the second integrated waveguide 214. While monitoring thelight intensity, the robotic system can slightly adjust the position ofthe second chip 220, for example, in the Y and Z directions until atarget X Y position is reached where the light intensity in the outputwaveguide 214 is maximized. At that point, the epoxy glue can be curedby exposing the epoxy glue to ultraviolet light, for example, usingknown techniques. It is to be understood that the exemplary assemblytechniques discussed above can also be implemented for single edgecoupling of chips in the package structures shown in FIGS. 3-8.

The single edge coupling of the package structure 200 of FIG. 2alleviates much of the manufacturing and placement tolerances and costs,as compared to the multi-edge coupling in the package structure 100 ofFIG. 1. Indeed, in the package structure of FIG. 2, no strict toleranceis needed on the dimensions of the first and second chips 210 and 220 asthe alignment (e.g., X-direction alignment) between the first and secondchips 210 and 220 is performed between a single edge (E1 and E2) of eachchip 210 and 220. In this regard, the gap G between the critical edgesE1 and E2 of the first and second chips 210 and 220 can be made verysmall, e.g., less than 0.1 micron, wherein placing and sliding the chips210 and 220 into contact at the critical edges E1 and E2 relaxes theassembly constraints and facilitates the ease of the X-directionalignment.

In addition, the single edge coupling between the critical edges E1 andE2 serves to relax the constraints for the Y-direction and Z-directionalignment. For example, as shown in FIG. 2, the spacing S1 between thefirst and second integrated waveguides 212 and 214 on the first chip210, and the spacing S2 between the first and second integratedwaveguide portions 222 and 224 on the second chip 220 can be tightlycontrolled as the spacings S1 and S2 between the integrated waveguidesare determined using lithography, which is extremely accurate. In thisregard, since the integrated waveguide structures are formed usinglithography techniques, the dimensions of the integrated waveguides(e.g., cross-sectional area), and the spacings S and S2 on each of thechips 210 and 220 can be fabricated to be substantially the same,thereby facilitating and enhancing alignment capability in the Y and Zdirections. As such, the I/O optical signal coupling between the singleedged coupled chips 210 and 220 can be optimal.

The U-shaped waveguide 221 on the second chip 220 requires waveguidebending turns (e.g., the bending portions connecting the third waveguideportion 223 to the first and second waveguide portions 222 and 224). Inseveral materials of interest (III-V semiconductors, LiNb material), thebending turns must be wide (hundreds of micrometers) because the waveindices (optical indices) are small, or the difference of indicesbetween the waveguide and the cladding material is small. For example,with LiNB waveguides, the minimum radius of curvature (ROC) of the bendsis about 7 mm, which forces the spacings S1 and S2 between the I/Oportions of the integrated waveguides on the first and second chips 210and 220 to be relatively large. In this regard, the footprint size ofsecond chip 220 (e.g., OE chip) must be relatively large, e.g., on theorder of millimeters or centimeters, in order to accommodate the lowbending radii for the U-shaped waveguide 221. This is not practical fortypical OE chips which are designed to have sizes that are less than 1mm.

Embodiments of the invention shown in FIGS. 3-8 provide solutions toimplement single edge coupling while minimize the size of the OE chip(typically smaller than a millimeter). The example embodiments of FIGS.3-8 include package structures in which at least one of the edge-coupledchips (e.g., OE chip) implements a signal reflection structure whichallows an optical signal propagating in a first (input) integratedwaveguide on the chip to be returned in a second (output) integratedwaveguide on the chip, such that the spacing between the input andoutput waveguides on each of the single edge coupled chips can be formedin close proximity to each other.

For example, FIG. 3 schematically illustrates a package structure 300which implements single edge coupling of chips with integratedwaveguides, according to an embodiment of the invention in which anoptical signal reflection structure is implemented on the OE chip. Inparticular, as shown in FIG. 3, the package structure 300 comprises afirst chip 310 and a second chip 320. The first chip 310 comprises afirst integrated waveguide 312 and a second integrated waveguide 314separated by a spacing S1. The second chip 320 comprises a first (input)integrated waveguide 322, a second (output) integrated waveguide 324,and an active region 325. The first and second integrated waveguides 312and 314 of the first chip 310 have end portions disposed at a criticaledge E1 of the first chip 310, and the input and output integratedwaveguides 322 and 324 have end portions disposed at a critical edge E2of the second chip 320. In addition, the I/O ends of the integratedwaveguides 322 and 324 are spaced by a distance S2, which is equal toSi. It is to be understood that the various components of the packagestructure 300 can be formed of the same or similar materials,structures, and optical signal processing circuitry as in otherembodiments discussed above.

As further shown in FIG. 3, the integrated waveguides 322 and 324 on thesecond chip 320 have bending profiles such that end portion of theintegrated waveguides 322 and 324 converge at an edge E3 of the secondchip 320. A reflective coating 326 is disposed on the edge E3 of thesecond chip 320. The reflective coating 326 is formed of ahighly-reflective, thin coating of dielectric material (e.g., magnesiumfluoride, calcium fluoride, etc.) which has an index of refraction whichis different from the index of refraction of the material used to formthe integrated waveguides 322 and 324. The reflective coating 326 can beformed of two or more layers of different types of dielectric materialto optimize reflections for optical signals with different operatingwavelengths. The reflective coating 326 on the edge E3 of the secondchip 320 is configured to reflect an optical signal from the firstintegrated waveguide 322 into the second integrated waveguide 324 (atthe converging ends of the integrated waveguides 322 and 324) so thatthe optical signal can propagate in the second integrated waveguide 324of the second chip 320, and be returned to the second integratedwaveguide 314 of the first chip 310. This embodiment eliminates/relaxesthe ROC size requirement of the U-shaped waveguide 221 in the embodimentof FIG. 2, which allows the spacing S1 and S2 to be relatively smallerand, thus, allows the chip footprints to be relatively smaller. Forexample, the spacing S1 and S2 can be on order of 10's of microns orless, and the length of the second chip 320 can be less than a fractionof 1 mm.

FIG. 3 illustrates an example embodiment in which the reflecting edge E3is a physical edge of the second chip 320. However, in an alternateembodiment, the reflecting edge E3 may comprise an internal edge (e.g.,discontinuity) which is formed by etching a hole or cavity within thesecond chip 320 at the converging ends of the integrated waveguides 322and 324. The vertical sidewalls of the etched hole or cavity can becoated with a highly-reflective, thin coating of dielectric material toform a reflective coating (similar to the reflective coating 326 shownin FIG. 3). In this manner, the reflecting edge (as provided by theetched hole or cavity) could be disposed in any suitable area of thesecond chip 320, so that the length of the integrated waveguides 322 and324 can be decoupled from, and not dependent on, the size of the secondchip 320.

In another embodiment, instead of utilizing the reflective coating 326on the edge E3 of the second chip 320, a Total Internal Reflection (TIR)mechanism can be implemented to cause reflection of the optical signalat the converging ends of the integrated waveguides 322 and 324 via TIRof the signal at the edge E3 of the second chip 320. In thisconfiguration, the converging ends of the first and second integratedwaveguides 322 and 324 at the edge E3 of the second chip 320 aredisposed at no less than some minimum angle (e.g., 90 degrees) toeffectuate TIR and reflection of the optical signal from the firstintegrated waveguide 322 into the second integrated waveguide 324. Theminimum angle will vary depending on the materials of the integratedwaveguides and the propagating modes of the optical signals, as isunderstood by one of ordinary skill in the art. Since the minimum anglebetween the converging ends of the first and second integratedwaveguides 322 and 324 is relatively wide (often on the order of 90degrees), this configuration can result in an increase in the size ofthe second chip 320 (e.g., OE chip), as compared to using the reflectivecoating 326 (which relaxes the minimum angle requirement associated withTIR).

An alternative embodiment for the reflective element makes use of aBragg grating as a reflector instead of a discontinuity (e.g.,reflective coating or TIR). For example, FIG. 4 schematicallyillustrates a package structure 400 which implements single edgecoupling of chips with integrated waveguides, according to an embodimentof the invention in which a reflection mechanism is implemented using aBragg reflector. In particular, as shown in FIG. 4, the packagestructure 400 comprises a first chip 410 and a second chip 420. Thefirst chip 410 comprises a first integrated waveguide 412 and a secondintegrated waveguide 414 separated by a spacing S1. The second chip 420comprises a first (input) integrated waveguide 422 and a second (output)integrated waveguide 424, which pass through an active region 425. Thefirst and second integrated waveguides 412 and 414 of the first chip 410have end portions disposed at a critical edge E1 of the first chip 410,and the input and output integrated waveguides 422 and 424 of the secondchip 420 have end portions disposed at a critical edge E2 of the secondchip 410. It is to be understood that the various components of thepackage structure 400 can be formed of the same or similar materials,structures, and optical signal processing circuitry as in otherembodiments discussed above.

As further shown in FIG. 4, the first integrated waveguide 422 and thesecond integrated waveguide 424 of the second chip 420 have widenedportions 422-1 and 424-1 which interface with a Bragg reflector 426formed on the second chip 420. The Bragg reflector 426 serves as adistributed reflector, wherein each dashed line shown in FIG. 4 denotesa partial reflector. Each partial reflector can be a groove that isformed in the semiconductor material, or a separate thin wire/line ofmaterial that acts as a partial reflector. The Bragg reflector 426 actsas a reflector for parallel optical beams propagating in the waveguides.The partial reflectors (dashed lines) of the Bragg reflector 426 aredisposed adjacent to each other as at a given periodicity such that eachpartial reflector reflects a portion of the optical beam, and allreflected portions of the optical signal are coherent and in-phase and,thus, constructively interfere to provide substantially the sameincident optical signal at the input of the Bragg reflector 426.

As is known in the art, to implement sufficient reflection, a lownumerical aperture (NA) wide mode is desired (NA angle<10 degrees) forefficient reflection and coupling into the return waveguide 424, andminimizing back-reflection. In the example embodiment of FIG. 4, this isachieved by widened portions 422-1 and 424-1 of the integratedwaveguides 422 and 424 (over a small length (100 um)) near the input andoutput of the Bragg reflector 426. The widened waveguide regions 422-1and 424-1 serve to produce optical modes with low numerical aperture(e.g., producing more parallel beams of light).

FIG. 5 schematically illustrates a package structure 500 whichimplements single edge coupling of chips with integrated waveguides,according to an embodiment of the invention in which a reflectionmechanism is implemented using a Bragg reflector. In particular, asshown in FIG. 5, the package structure 500 comprises a first chip 510and a second chip 520. The first chip 510 comprises a first integratedwaveguide 512 and a second integrated waveguide 514 separated by aspacing S1. The second chip 520 comprises a first (input) integratedwaveguide 522, and a second (output) integrated waveguide 524, whichpass through an active region 525. The first and second integratedwaveguides 512 and 514 of the first chip 510 have end portions disposedat a critical edge E1 of the first chip 510, and the input and outputintegrated waveguides 522 and 524 have end portions disposed at acritical edge E2 of the second chip 520. It is to be understood that thevarious components of the package structure 500 can be formed of thesame or similar materials, structures, and optical signal processingcircuitry as in other embodiments discussed above.

In addition, the first integrated waveguide 522 and the secondintegrated waveguide 524 of the second chip 520 have converging portionswhich interface with a curve-shaped Bragg reflector 526 formed on thesecond chip 520. The Bragg reflector 526 serves as a distributedreflector, wherein each curved dashed line shown in FIG. 5 denotes apartial reflector. Each partial reflector can be a groove that is formedin the semiconductor material, or a separate thin wire/line of materialthat acts as a partial reflector. In this embodiment, the inputwaveguide 522 and the output waveguide 524 are more physically separatedas compared to the embodiment of FIG. 4 wherein the input/outputwaveguide portions of the Bragg reflector 426 which converge into directcontact (“X” configuration). The configuration of the curved Braggreflector 526 serves to minimize undesirable back-reflections into theinput waveguide, wherein the curved reflectors are designed to refocusthe incoming spreading wave-front into the outgoing waveguide, forbetter efficiency.

FIG. 6 schematically illustrates a package structure 600 whichimplements single edge coupling of chips with integrated waveguides,according to an embodiment of the invention, in which a dual-reflectionmechanism is implemented to allow an optical signal to be input in afirst integrated waveguide and returned in a second integrated waveguidethat is disposed in close proximity to the first integrated waveguide.The package structure 600 comprises a first chip 610 and a second chip620. The first chip 610 comprises a first integrated waveguide 612 and asecond integrated waveguide 614 separated by a spacing S1. The secondchip 620 comprises a first (input) integrated waveguide 622 and a second(output) integrated waveguide 624, which pass through an active region625. The first and second integrated waveguides 612 and 614 of the firstchip 610 have end portions disposed at a critical edge E1 of the firstchip 610, and the input and output integrated waveguides 622 and 624have end portions disposed at a critical edge E2 of the second chip 620.

In addition, the second chip 620 comprises a first reflector element 630and a second reflector element 632, and an integrated waveguide 623disposed between the reflector elements 630 and 632. In the exemplaryembodiment of FIG. 6, an end portion of the first integrated waveguide622 is coupled to one end of the integrated waveguide 623, and an endportion of the second integrated waveguide 624 is coupled to another endof the integrated waveguide 623. The first and second reflector elements630 and 632 may be cavities that are etched into the surface of thesecond chip 620 to provide air interfaces (discontinuities) that allowoptical signals to be reflected using TIR. In other embodiments, thereflector elements 630 and 632 can be formed by etching cavities in thesurface of the second chip, and then coating the cavity sidewalls with areflective coating. It is to be understood that the various componentsof the package structure 600 can be formed of the same or similarmaterials, structures, and optical signal processing circuitry as inother embodiments discussed above.

The embodiment of FIG. 6 with the dual reflector elements 630 and 632allows the spacing S1 and S2 between the I/O portions of the integratedwaveguides to be extremely small (on the order of 10's of microns orless) since the angle between incident and reflected beams can be on theorder of 90 degrees for each reflector. In other embodiments, more thantwo reflector elements can be utilized in conjunction with waveguidebends on the second chip 620. In all embodiment, the aim and benefit isto provide a small spacing S1 and S2 between the I/O waveguide pairsthat are coupled across the critical edges E1 and E2 between the twochips 610 and 620, and thereby to minimize the overall dimensions of thesecond (OE) chip 620.

FIG. 7 schematically illustrates a package structure 700 whichimplements single edge coupling of chips with integrated waveguides,according to an embodiment of the invention in which a reflectionmechanism is implemented using contra-directional add-drop filter(“Arroyo coupler”). In particular, as shown in FIG. 7, the packagestructure 700 comprises a first chip 710 and a second chip 720. Thefirst chip 710 comprises a first integrated waveguide 712 and a secondintegrated waveguide 714 separated by a spacing S1. The second chip 720comprises a contra-directional add-drop filter 721 (or Arroyo coupler)comprising a first (input) integrated waveguide portion 722, a reflectorportion 723, and a second (output) integrated waveguide portion 724,wherein the first and second integrated waveguide portions 722 and 724pass through an active region 725. The first and second integratedwaveguides 712 and 714 of the first chip 710 have end portions disposedat a critical edge E1 of the first chip 710, and the input and outputintegrated waveguide portions 722 and 724 of the Arroyo coupler 721 haveend portions disposed at a critical edge E2 of the second chip 720. Itis to be understood that the various components of the package structure700 can be formed of the same or similar materials, structures, andoptical signal processing circuitry as in other embodiments discussedabove.

The functions and operating modes of the add-drop filter 721 are wellknown in the art, as described in the publication by Kewitsch, et al.,“All-Fiber Zero-Insertion-Loss Add-Drop Filter for Wavelength-DivisionMultiplexing,” OPTICS LETTERS, Vol. 23, No. 2, Jan. 15, 1998, which isincorporated herein by reference. The input and output integratedwaveguide portions 722 and 724 converge to a common path of the coupler721. The reflector portion 723 of the Arroyo coupler 721 comprises aBragg grating that is fabricated over (or near) the common path. TheArroyo coupler 721 is asymmetric, whereby the input and outputwaveguides are optimized for different wave modes and therefore some ofthe return waveguide (of the second (OE) chip 720 and/or the first chip710 (e.g., photonics chip) must operate on a different wave mode(typically, the lateral size or spread of the reflected wave isdifferent than the size of incoming wave).

FIG. 8 schematically illustrates a package structure 800 whichimplements single edge coupling of chips with integrated waveguides,according to an embodiment of the invention in which a reflectionmechanism is implemented using adiabatic coupler/combiner and phasecontrol. In particular, as shown in FIG. 8, the package structure 800comprises a first chip 810 and a second chip 820. The first chip 810comprises an adiabatic coupler 811 (e.g., 50/50 adiabatic coupler)comprising a first integrated waveguide 812 and a second integratedwaveguide 814, wherein the first and second waveguides 812 and 814 havethe same widths W1 and W2, or different widths W1 and W2, wherein W2 isgreater than W1. The adiabatic coupler 811 comprises three sections811-1, 811-2, and 811-3. In the first section 811-1, the first andsecond integrated waveguides 812 and 814 converge towards each otherthrough S-bends. The second section 811-2 comprises a “coupling section”in which the two (e.g., asymmetric) integrated waveguides 812 and 814are linearly tapered equal width waveguides that are disposed adjacentto each other in close proximity. In the third section, the first andsecond integrated waveguides 812 and 814 (of equal width) diverge awayfrom each other by S-bends and terminate at the critical edge E1 of thefirst chip 810, where they are separated by a spacing S1.

The first chip 810 further comprises fast phase modulation circuitry 830and delay circuitry 840. The fast phase modulation circuitry 830comprises first and second phase modulator devices 831 and 832integrally coupled to the first and second integrated waveguides 812 and814 in the third section 811-3 of the adiabatic coupler 811. The delaycircuitry 840 (which is optional) comprises first and second delayelements 841 and 842 integrally coupled to the first and secondintegrated waveguides 812 and 814, respectively, in the third section811-3 of the adiabatic coupler 811.

The second chip 820 comprises a first integrated waveguide 822 and asecond integrated waveguide 824, which pass through an active region825. The first and second integrated waveguides 822 and 824 have endportions disposed at a critical edge E2 of the second chip 820 andopposing end portions disposed at a reflecting edge E3 of the secondchip 820. In one embodiment, a reflective coating 826 is applied to thereflecting edge E3 of the second chip 820. It is to be understood thatthe various components of the package structure 800 can be formed of thesame or similar materials, structures, and optical signal processingcircuitry as in other embodiments discussed above.

FIG. 8 illustrates an example embodiment based on active phase controlor switching following the 50/50 adiabatic coupler 811 in the first chip810 (photonic wave circuit). As shown by the directional arrows in theintegrated waveguides of FIG. 8, an optical signal is input to the firstintegrated waveguide 812 (first Port) in the first section 811-1 of theadiabatic coupler 811 on the first chip 810. The input optical signalpropagates to the coupling section 811-2 of the adiabatic coupler 811and is split into two optical signals that propagate in the portions ofthe first and second integrated waveguides 812 and 814 (second and thirdPorts) in the third section 811-3 towards the critical edge E1 of thefirst chip 810. The input optical signals undergo a time dependent phasemodulation by operation of the phase modulation elements 831 and 832(and optional delay elements 841 and 842). In one embodiment, the phasemodulation operations are configured so that a phase difference is 180degrees when the optical signals return to the coupler section 811-2,which results in constructive interference of the two optical signals,to generate an output optical signal which is output to (and propagatesalong) the second integrated waveguide 814 (4^(th) port of the coupler)in the first section 811-1 of the adiabatic coupler 811.

FIG. 8 provides an exemplary embodiment in which the first and secondintegrated waveguides 822 and 824 in the second chip 820 are not coupledto each other. Instead, optical signals that are input-coupled to thefirst and second integrated waveguides 822 and 824 (from the first andsecond integrated waveguides 812 and 814 on the first chip 810) willpropagate along the first and second integrated waveguides 822 and 824through the active region 825. The optical signals are then reflectedback by the reflective coating 826 at the edge E3 of the second chip820, and propagate back along the first and second integrated waveguides822 and 824 to the critical edge E2 of the second chip 820, where thereflected signals are then coupled back to the end portions of the firstand second integrated waveguides 812 and 814 at the critical edge E1 ofthe first chip 810. In this regard, there is bi-directional propagationof optical signals in the first and second integrated waveguides 822 and824 in the second chip 820, as well as bi-directional propagation ofoptical signals in the portions of the first and second integratedwaveguides 812 and 814 in the third section 811-3 of adiabatic coupler811.

Although the example embodiments in FIGS. 2-8 schematically illustratethe waveguide angles at the chip edges E1 and E2 to be 90 degrees, theangles of the integrated waveguides at the critical edges E1 and E2 canmade to vary, e.g., between 90+/−7 degrees to 90+/−15. The anglesbetween the integrated waveguides and the critical edges E1 and E2 canbe selected to minimize optical back-reflections.

Although exemplary embodiments have been described herein with referenceto the accompanying drawings for purposes of illustration, it is to beunderstood that the present invention is not limited to those preciseembodiments, and that various other changes and modifications may beaffected herein by one skilled in the art without departing from thescope of the invention.

1. A package structure comprising: a first chip comprising a firstcritical edge, a first integrated waveguide, and a second integratedwaveguide, wherein the first and second integrated waveguides of thefirst chip each comprise an end portion that terminates on the firstcritical edge of the first chip; a second chip comprising a secondcritical edge, a first integrated waveguide, a second integratedwaveguide, and a signal reflection structure, wherein the first andsecond integrated waveguides of the second chip each comprise an endportion that terminates on the second critical edge of the second chip,and an end portion that is coupled to the signal reflection structure,wherein the signal reflection structure is configured to reflect anoptical signal propagating in at least one of the first and secondintegrated waveguides of the second chip; wherein the first and secondchips are edge-coupled at the first and second critical edges such thatthe end portions of the first integrated waveguides of the first andsecond chips are aligned to each other, and the end portions of thesecond integrated waveguides of the first and second chips are alignedto each other; wherein the signal reflection structure comprises adiscontinuity in the first and second integrated waveguides of thesecond chip, wherein the discontinuity is configured to reflect anoptical signal propagating in the first integrated waveguide of thesecond chip into the second integrated waveguide of the second chip;wherein the discontinuity comprises a cavity etched in a surface of thesecond chip to form a vertical wall, wherein the first and secondintegrated waveguides of the second chip have end portions thatterminate at the vertical wall of the cavity; and a reflective coatingdisposed on the vertical wall of the cavity etched in the surface of thesecond chip, wherein the reflective coating is configured to increase asignal reflectivity of the vertical wall.
 2. The package structure ofclaim 1, wherein the second chip comprises an optoelectronics chip withoptical signal processing circuitry configured to process an opticalsignal propagating in at least one of first and second integratedwaveguides of the second chip.
 3. The package structure of claim 2,wherein the optical signal processing circuitry comprises at least oneof a semiconductor optical amplifier, an optoelectronic modulator, and awavelength division multiplexer.
 4. (canceled)
 5. (canceled) 6.(canceled)
 7. (canceled)
 8. (canceled)
 9. (canceled)
 10. A packagestructure comprising: a first chip comprising a first critical edge, afirst integrated waveguide, and a second integrated waveguide, whereinthe first and second integrated waveguides of the first chip eachcomprise an end portion that terminates on the first critical edge ofthe first chip; a second chip comprising a second critical edge, a firstintegrated waveguide, a second integrated waveguide, and a signalreflection structure, wherein the first and second integrated waveguidesof the second chip each comprise an end portion that terminates on thesecond critical edge of the second chip, and an end portion that iscoupled to the signal reflection structure, wherein the signalreflection structure is configured to reflect an optical signalpropagating in at least one of the first and second integratedwaveguides of the second chip; wherein the first and second chips areedge-coupled at the first and second critical edges such that the endportions of the first integrated waveguides of the first and secondchips are aligned to each other, and the end portions of the secondintegrated waveguides of the first and second chips are aligned to eachother; wherein the signal reflection structure of the second chipcomprises a Bragg reflector structure connected to end portions of thefirst and second integrated waveguides of the second chip; wherein thefirst integrated waveguide and the second integrated waveguide of thesecond chip have converging end portions which interface with a curvedBragg grating of the Bragg reflector structure, wherein the curved Bragggrating comprises a plurality of curved partial reflectors arrangedadjacent to each other; and wherein the first and second integratedwaveguides of the second chip comprise parallel end portions thatterminate on the second critical edge of the second chip, wherein theparallel end portions and the converging end portions of the first andsecond integrated waveguides of the second chip are equal in width. 11.(canceled)
 12. (canceled)
 13. A package structure comprising: a firstchip comprising a first critical edge, a first integrated waveguide, anda second integrated waveguide, wherein the first and second integratedwaveguides of the first chip each comprise an end portion thatterminates on the first critical edge of the first chip; a second chipcomprising a second critical edge, a first integrated waveguide, asecond integrated waveguide, and a signal reflection structure, whereinthe first and second integrated waveguides of the second chip eachcomprise an end portion that terminates on the second critical edge ofthe second chip, and an end portion that is coupled to the signalreflection structure, wherein the signal reflection structure isconfigured to reflect an optical signal propagating in at least one ofthe first and second integrated waveguides of the second chip; whereinthe first and second chips are edge-coupled at the first and secondcritical edges such that the end portions of the first integratedwaveguides of the first and second chips are aligned to each other, andthe end portions of the second integrated waveguides of the first andsecond chips are aligned to each other; wherein the signal reflectionstructure of the second chip comprises a Bragg reflector structureconnected to end portions of the first and second integrated waveguidesof the second chip; wherein the first integrated waveguide and thesecond integrated waveguide of the second chip have converging endportions which interface with a non-curved Bragg grating of the Braggreflector structure, wherein the non-curved Bragg grating comprises aplurality of straight partial reflectors arranged in parallel andadjacent to each other.
 14. The package structure of claim 13, whereinthe first and second integrated waveguides of the second chip compriseparallel end portions that terminate on the second critical edge of thesecond chip, wherein the converging end portions of the first and secondintegrated waveguides are wider than the parallel end portions of thefirst and second integrated waveguides.
 15. A package structurecomprising: a first chip comprising a first critical edge, a firstintegrated waveguide, and a second integrated waveguide, wherein thefirst and second integrated waveguides of the first chip each comprisean end portion that terminates on the first critical edge of the firstchip; a second chip comprising a second critical edge, a firstintegrated waveguide, a second integrated waveguide, and a signalreflection structure, wherein the first and second integrated waveguidesof the second chip each comprise an end portion that terminates on thesecond critical edge of the second chip, and an end portion that iscoupled to the signal reflection structure, wherein the signalreflection structure is configured to reflect an optical signalpropagating in at least one of the first and second integratedwaveguides of the second chip; wherein the first and second chips areedge-coupled at the first and second critical edges such that the endportions of the first integrated waveguides of the first and secondchips are aligned to each other, and the end portions of the secondintegrated waveguides of the first and second chips are aligned to eachother; wherein the signal reflection structure of the second chipcomprises a Bragg reflector structure connected to end portions of thefirst and second integrated waveguides of the second chip; wherein thesecond chip comprises an optoelectronics chip with optical signalprocessing circuitry configured to process an optical signal propagatingin at least one of first and second integrated waveguides of the secondchip.
 16. The package structure of claim 15, wherein the optical signalprocessing circuitry comprises at least one of a semiconductor opticalamplifier, an optoelectronic modulator, and a wavelength divisionmultiplexer.
 17. A package structure comprising: a first chip comprisinga first critical edge, a first integrated waveguide, and a secondintegrated waveguide, wherein the first and second integrated waveguidesof the first chip each comprise an end portion that terminates on thefirst critical edge of the first chip; a second chip comprising a secondcritical edge, a first integrated waveguide, a second integratedwaveguide, and a signal reflection structure, wherein the first andsecond integrated waveguides of the second chip each comprise an endportion that terminates on the second critical edge of the second chip,and an end portion that is coupled to the signal reflection structure,wherein the signal reflection structure is configured to reflect anoptical signal propagating in at least one of the first and secondintegrated waveguides of the second chip; wherein the first and secondchips are edge-coupled at the first and second critical edges such thatthe end portions of the first integrated waveguides of the first andsecond chips are aligned to each other, and the end portions of thesecond integrated waveguides of the first and second chips are alignedto each other; wherein the first and second integrated waveguides of thefirst chip are configured as an adiabatic coupler comprising a couplingsection in which portions of the first and second integrated waveguidesare disposed adjacent to each other in close proximity for coupling;wherein the first chip comprises phase modulator circuitry to activelymodify a phase of a signal propagating in portions of the secondintegrated waveguides of the adiabatic coupler; wherein the first andsecond integrated waveguides of the second chip are separate from eachother and are coupled to respective end portions of the first and secondintegrated waveguides that form the adiabatic coupler through the edgecoupling of the first and second critical edges of the first and secondchips; and wherein the signal reflection structure of the second chip isconfigured to reflect separate signals propagating in the first andsecond integrated waveguides of the second chip to providebi-directional signal propagation in the first and second integratedwaveguides of the second chip such both the first and second integratedwaveguides of the second chip provide signal input/output to/from therespective portions of the first and second integrated waveguides thatform the adiabatic coupler.
 18. The package structure of claim 17,wherein the first and second integrated waveguides of the second chiphave end portions that terminate on third edge of the second chip,wherein the third edge of the second chip comprises the signalreflection structure.
 19. The package structure of claim 18, furthercomprising a reflective coating disposed on the third edge of the secondchip, wherein the reflective coating is configured to increase a signalreflectivity of the third edge of the second chip.
 20. The packagestructure of claim 17, wherein the second chip comprises anoptoelectronics chip with optical signal processing circuitry configuredto process an optical signal propagating in at least one of first andsecond integrated waveguides of the second chip, wherein the opticalsignal processing circuitry comprises at least one of a semiconductoroptical amplifier, an optoelectronic modulator, and a wavelengthdivision multiplexer.
 21. The package structure of claim 10, wherein thesecond chip comprises an optoelectronics chip with optical signalprocessing circuitry configured to process an optical signal propagatingin at least one of first and second integrated waveguides of the secondchip.
 22. The package structure of claim 21, wherein the optical signalprocessing circuitry comprises at least one of a semiconductor opticalamplifier, an optoelectronic modulator, and a wavelength divisionmultiplexer.
 23. The package structure of claim 13, wherein the secondchip comprises an optoelectronics chip with optical signal processingcircuitry configured to process an optical signal propagating in atleast one of first and second integrated waveguides of the second chip.24. The package structure of claim 23, wherein the optical signalprocessing circuitry comprises at least one of a semiconductor opticalamplifier, an optoelectronic modulator, and a wavelength divisionmultiplexer.